Transducers ’01 Eurosensors XV : The 11th International Conference on Solid-State Sensors and Actuators June 10 – 14, 2001 Munich, Germany

Front Matter....Pages i-xxxii Front Matter....Pages 1-1 Technologies for Microturbomachinery....Pages 2-5 MEMS Meets Insects....Pages 6-9 Front Matter....Pages 11-11 Retina Implant — A BioMEMS Challenge....Pages 12-18 MEMS—the view back…and the vistas ahead....Pages 20-23 Front Matter....Pages 25-25 Miniaturized Thermoelectric Generators Based on Poly-Si and Poly-SiGe Surface Micromachining....Pages 26-29 A Combustion-Based MEMS Thermoelectric Power Generator....Pages 30-33 An Integrated Combustor-Thermoelectric Micro Power Generator....Pages 34-37 A Laser-micromachined Vibrational to Electrical Power Transducer for Wireless Sensing Systems....Pages 38-41 Micro Generator Systems....Pages 42-45 The Modelling of a Piezoelectric Vibration Powered Generator for Microsystems....Pages 46-49 Front Matter....Pages 51-51 A Miniaturized, Autonomous, Programmable Stress Monitoring Device, part of a Dental Prosthesis....Pages 52-55 Monolithic Surface-Micromachined Sensor System for High Pressure Applications....Pages 56-59 Dedicated Interface Electronics for Capacitively-Coupled Conductivity Detection in On-chip Capillary Electrophoresis....Pages 60-63 Sensitivity Enhancement of MEMS Inertial Sensors Using Negative Springs and Active Control....Pages 64-67 A Smart Wind-Sensor based on Thermal Sigma-Delta Modulation....Pages 68-71 High Mass and Spatial Resolution Mass Sensor based on Resonating Nano-Cantilevers Integrated with CMOS....Pages 72-75 Position Sensing System Using Integrated Magnetic Sensors and Neural Networks....Pages 76-79 An Accurate CMOS Smart Temperature Sensor with Dynamic Element Matching and Second-Order Curvature Correction....Pages 80-83 The Scaling of Multiple Sensor Signals with a Wide Dynamic Voltage Range....Pages 84-87 Integrated multi-sensor system for intelligent data carrier....Pages 88-91 Front Matter....Pages 51-51 Novel Surface-Micromachined Low-Power Fuses for On-Chip Calibration....Pages 92-95 Sensors Linearity Improvement by Means of Dithering: Feasibility and Limits....Pages 96-99 Electronic protection of the conductivity detector in a micro capillary electrophoresis channel....Pages 100-103 Sophisticated Interface Electronics for QCM....Pages 104-107 Front Matter....Pages 109-109 Bimorph Piezoelectric Acoustic Transducer....Pages 110-113 High-Directivity Array of Ultrasonic Micro Sensor Using PZT Thin Film on Si Diaphragm....Pages 114-117 Self-Calibrating Micromachined Microphones with Integrated Optical Displacement Detection....Pages 118-121 Single-Chip Low-Voltage Analog-to-Digital Interface for Encapsulation with Electret Microphone....Pages 122-125 Silicon Microphones with Low Stress Membranes....Pages 126-129 Fabrication of a Biomimetic Corrugated Polysilicon Diaphragm with Attached Single Crystal Silicon Proof Masses....Pages 130-133 Front Matter....Pages 135-135 Reference Magnetic Actuator for self Calibration of a very small Hall Sensor Array....Pages 136-139 A Vertical Hall Device in CMOS High-Voltage Technology....Pages 140-143 Single deposition GMR sensors for rotational speed sensing....Pages 144-147 High Directional Sensitivity of Micromachined Magnetic Fluxgate Sensors....Pages 148-151 Magnetic Sensor Based on Stabilized MOSFET Field Emitter Arrays....Pages 152-155 A New Highly Sensitive Parallel — Field Hall Microsensor....Pages 156-159 High Sensitivity Hall Magnetic Sensors Using Planar Micro and Macro Flux Concentrators....Pages 160-163 Ferromagnetic Micromechanical Magnetometers....Pages 164-167 A study on narrow-range angle sensors based on wiggles in angular dependence of pseudo-Hall effect in permalloy thin films....Pages 168-171 Stochastically distributed nanowires with micro-lithographic interconnects for magnetic field sensors....Pages 172-175 Front Matter....Pages 177-177 Selective Encapsulation Using a Polymeric or Bonded Silicon Constraint Dam for Media Compatible Pressure Sensor Applications....Pages 178-181 Wafer-Level Packaging Using Localized Mass Deposition....Pages 182-185 “Cavity-Micromachining” Technology: Zero-Package Solution for Inertial Sensors....Pages 186-189 Accelerated Hermeticity Testing of a Glass-Silicon Package Formed by RTP Aluminum-to-Silicon Nitride Bonding....Pages 190-193 An Ultra-Thin Hermetic Package Utilizing Electroplated Gold....Pages 194-197 Plastic BGA Package and Direct Filter Attachment for CMOS Thermal Imagers....Pages 198-201 Novel optical transceiver with compound parabolic concentrator for graded index plastic optical fiber....Pages 202-205 Mounting of Si-Chips with Plastically Bent Cantilevers....Pages 206-209 Anisotropic Conductive Adhesion of Microsensors Applied in the Instance of a Low Pressure Sensor....Pages 210-213 Nanosecond-Pulsed Laser Bonding with a Built-in Mask for MEMS Packaging Applications....Pages 214-217 Local Laser Bonding for Low Temperature Budget....Pages 218-221 An 8-inch Wafer Bonding Apparatus with Ultra-High Alignment Accuracy Using Surface Activated Bonding (SAB) Concept....Pages 222-225 Si-Si Bonding Using RF and Microwave Radiation....Pages 226-229 Anodic-Bonding on Glass Layers Prepared by a Spin-on Glass Process: Preparation Process and Experimental Results....Pages 230-233 Silicon Pyrex Electrostatic Bonding : Applicability to Industrial Microdevices Production....Pages 234-237 Front Matter....Pages 239-239 Improved Coupled-Field FE Analysis of Micromachined Electromechanical Transducers....Pages 240-243 Theoretical Analysis of the Tilting Effect in Silicon Micro-Switches....Pages 244-247 Macromodeling of an Electrostatic Torsional Actuator....Pages 248-251 A Novel Topology Design Scheme for the Multi-Physics Problems of Electro-Thermally Actuated Compliant Micromechanisms....Pages 252-255 An Analytical Model of the Piezojunction Effect for Arbitrary Stress and Current Orientations....Pages 256-259 Front Matter....Pages 239-239 Computational Methods for Reduced Order Modeling of Coupled Domain Simulations....Pages 260-263 Automatic Reduced-Order Modeling in MEMCAD using Modal Basis Functions....Pages 264-267 Modeling and Simulation of Microelectromechanical Systems with an Analog Hardware Description Language....Pages 268-271 Automatic transfer from bulk-silicon technology simulation into the FEM-environment....Pages 272-275 Efficient Numerical Predictions of MEMS Fluid-Structure Interaction Damping....Pages 276-279 Layout Extraction for Integrated Electronics and MEMS Devices....Pages 280-283 A High Torque Density MEMS Magnetic Induction Machine....Pages 284-287 Modeling the Pull-In Parameters of Electrostatic Actuators with a Novel Lumped Two Degrees of Freedom Pull in Model....Pages 288-291 On the Effect of Residual Charges on the Pull-In Parameters of Electrostatic Actuators....Pages 292-295 Low Voltage Driven Capillary Electrophoresis Chips Using Travelling Electric Field Design....Pages 296-299 Modeling and Characterization of Lamé-mode Microresonators Realized by UV-LIGA....Pages 300-303 Design and Simulation of Capacitive, Piezoresistive and Piezoelectric Triaxial Accelerometers Using a Highly Symmetrical Quad-Beam Structure....Pages 304-307 Fet Pressure Sensor and Iterative Method for Modelling of the Device....Pages 308-311 Dielectric micro-hotplate for integrated sensors: An electro-thermo-mechanical analysis....Pages 312-315 On-Chip Integrated Silicon Bulk-Micromachined Soil Moisture Sensor Based on the DPHP Method....Pages 316-319 Front Matter....Pages 321-321 A Dielectrophoresis-based Array Cytometer....Pages 322-325 Fabrication of Directly Synthesized DNA Chip using Photolithography for Rapid and Parallel Gene Analysis....Pages 326-329 Immobilized Two Dimensional Protein Arrays by μ-Stamp and Protein Well....Pages 330-333 Electrochemical Gene Detection with PCR Chip....Pages 334-337 Soft Lithographic Techniques for Guidance of Hippocampal Neurons on Micro-Electrode Arrays....Pages 338-341 Front Matter....Pages 321-321 Development of superoxide sensor by superoxide dismutase immobilization....Pages 342-345 Bioelectronic Nose for Methyl Mercaptan Vapor using a Xenobiotic Metabolizing System....Pages 346-349 Radial Artery Pulse Detection System based on EIGHT Constitutional Medicine Theory....Pages 350-353 Development of a Multichannel Integrated Interferometer Immunosensor....Pages 354-357 Flexible BIOMEMS with Electrode Arrangements on Front and Back Side as Key Component in Neural Prostheses and Biohybrid Systems....Pages 358-361 Self-assemblage of redox proteins and nucleic acids onto a lipidic biosensor....Pages 362-365 Development of Receptor Based Affinity Microassay....Pages 366-369 An In-Line Osmometer for Application in Tissue Based Biosensor Systems....Pages 370-373 A Biosensor for Escherichia coli Based on a Potentiometric Alternating Biosensing (PAB) Transducer....Pages 374-377 Sensing Nitric Oxide Neuronal Messengers Using Screen-Printed Carbon Micro-Electrode Arrays....Pages 378-381 Cuff Actuator for Adaptive Holding Condition around Nerves....Pages 382-385 Intracellular Neuronal Recording with High Aspect Ratio MEMS Probes....Pages 386-389 Analysis of Microelectrode-Recorded Signals from a Cardiac Cell Line as a Tool for Pharmaceutical Screening....Pages 390-393 The Fabrication of the Novel Micro Time-of-Flight (TOF) Mass Spectrometer with a Micro Ion Source....Pages 394-397 Discrimination of D-Amino Acids from L-Amino Acids Using Membrane Characteristics Change....Pages 398-401 Design of Miniaturized Solid-State Sensors Based on Silicon Structure with Back-Side Contacts....Pages 402-405 Front Matter....Pages 407-407 A Miniaturized Analysis System Based on Capillary Electrophoresis and Contactless Conductivity Detection....Pages 408-411 Fabrication of a Micro Needle for a Trace Blood Test....Pages 412-415 A 256-Site 3D CMOS Microelectrode Array for Multipoint Stimulation and Recording in the Central Nervous System....Pages 416-419 A Disposable Intelligent Mosquito with a Reversible Sampling Mechanism Utilizing the Volume Phase Transition of a Gel....Pages 420-423 Front Matter....Pages 407-407 Micromachined Ultrasonic Ophthalmic Microsurgical Tool with Integrated Pressure Sensor....Pages 424-427 Front Matter....Pages 429-429 Inertial Sensors for Automotive Applications....Pages 430-433 RASTA: the Real-Acceleration-for-Self-Test Accelerometer....Pages 434-437 Fiber Optic — MEMS Accelerometer with high mass displacement resolution....Pages 438-441 A Monolithic Three-Axis Accelerometer with Symmetric Properties....Pages 442-445 5-Axis Capacitive Motion Sensor Fabricated by Silicon Micromachining Technique....Pages 446-449 A 19-Element Shock Sensor Array for Bi-Directional Substrate-Plane Sensing Fabricated by Sacrificial LIGA....Pages 450-453 Front Matter....Pages 455-455 A Symmetric Surface Micromachined Gyroscope with Decoupled Oscillation Modes....Pages 456-459 A Link Beam Driven, Triple Axis Angular Rate Sensor Based on a Double Gimbal Structure....Pages 460-463 New Approach for Frequency Matching of Tuning Fork Gyroscopes by Using a Nonlinear Driving Concept....Pages 464-467 Self-Test for Resonant Structure Sensors Applied to a Tuning Fork Gyro and a Resonant Accelerometer....Pages 468-471 New Digital Readout Electronics for Capacitive Sensors by the Example of Micro-Machined Gyroscopes....Pages 472-475 A Bulk-Micromachined Single Crystal Silicon Gyroscope Operating at Atmospheric Pressure....Pages 476-479 Front Matter....Pages 481-481 A Piezoresistive Low-Pressure Sensor Fabricated Using Silicon-on-Insulator (SOI) for Harsh Environment Applications....Pages 482-485 High Temperature Characterization of Ceramic Pressue Sensors....Pages 486-489 The NanoPirani — Presumably the World’s Smallest Pressure Sensor....Pages 490-493 Miniaturized pressure sensor using a free hanging strain-gauge with leverage effect for increased sensitivity....Pages 494-497 Capacitive Silicon Microsensor for Force and Torque Measurement....Pages 498-501 A New Vacuum Friction Gauge Based on a Si Tuning Fork....Pages 502-505 A Servo-Controlled Capacitive Pressure Sensor with a Three-Mask Fabrication Sequence....Pages 506-509 Front Matter....Pages 481-481 High temperature pressure sensor with monolithically integrated CMOS readout circuit based on SIMOX technology....Pages 510-513 Fabrication and Testing of Single Crystalline 3C-SiC Piezoresistive Pressure Sensors....Pages 514-517 Stable and Corrosion-Resistant Sapphire Capacitive Pressure Sensor for High Temperature and Harsh Environments....Pages 518-521 Front Matter....Pages 523-523 Transmission-Type Optical Sensors Fabricated by Si Micromachining....Pages 524-527 Miniature CO2 Gas Sensor (1 cm3) using Silicon Microbolometers and Micro Variable Infrared Filter....Pages 528-531 CMOS integrated wavefront sensor....Pages 532-535 Development of a Micro-Optical Distance Sensor with Electrical I/O Interface....Pages 536-539 Bias dependent photocurrent collection in p-i-n a-Si:H/SiC:H heterojunction....Pages 540-543 Photochemical Reaction By Nanometer-scale Light Emitting Diode-Antifuses....Pages 544-547 Fabrication and Optical Measurements of Multi-slit Grating Based Infrared micro-spectrometer....Pages 548-551 Si Micromachined Optical Encoder Based on Grating Imaging....Pages 552-555 CMOS Micromachined Infrared Imager Pixel....Pages 556-559 Wavelength-Differential Imaging Using Variable Interferometer and Visualization of Gas Flow....Pages 560-563 An Uncooled Infrared Sensor of Dielectric Bolometer Mode Using a New Detector Technique of Operation Bias Voltage....Pages 564-567 Pyroelectric High-Resolution Linear Array with 256 Micromachined Lithium Tantalate Pixels....Pages 568-571 Front Matter....Pages 573-573 A Chopperless Pyroelectric Active Pixel Infrared Image Sensor Using Chip Shift Operation....Pages 574-577 Laser scanned photodiodes (LSP) for Image sensing....Pages 578-581 Electron Emission Type Infrared Imaging Sensor Using Ferroelectric Thin Plate....Pages 582-585 A Millimeter-wave Image Sensor using Antenna Coupled Micro Thermocouple....Pages 586-589 A MEMS Non-interferometric Differential Confocal Scanning Optical Microscope....Pages 590-593 Front Matter....Pages 595-595 Micromachining of Piezoelectric MEMS....Pages 596-599 Methods for Fabrication of Released Nickel Comb-Drive Devices on CMOS....Pages 600-603 Anisotropic Si Etching Technique for Optically Smooth Surfaces....Pages 604-607 Ultra-Fast Anisotropic Silicon Etching with Resulting Mirror Surfaces in Ammonia Solutions....Pages 608-611 Aspect ratio and crystallographic orientation dependence in deep dry silicon etching at cryogenic temperatures....Pages 612-615 Fabrication of Micromechanical Structures of Titania and Titanium with Electrophoretic Deposition....Pages 616-619 Surface Micromachining Process for C-Si as Active Material....Pages 620-623 Advanced Sacrificial Poly-Si Technology for Fluidic Systems....Pages 624-627 A new processing technique to prevent stiction using silicon selective etching for SOI-MEMS....Pages 628-631 Electrochemical Etching for n-type Silicon using a Novel Etchant....Pages 632-635 A Novel Sub-Micron Gap Fabrication Technology Using Chemical-Mechanical Polishing (CMP): Application to Lateral Field Emission Device (FED)....Pages 636-639 Micro- and Nanopatterning of Sensor Chips by Means of Macroporous Silicon....Pages 640-643 Microfluidic Channel Routing with Protected Convex Corners....Pages 644-647 A New Explanation of Mask-corner Undercut in Anisotropic Silicon Etching: Saddle Point in Etching Rate Diagram....Pages 648-651 BrF3 Dry Release Technology for Large Freestanding Parylene MEMS....Pages 652-655 Front Matter....Pages 657-657 Nanoelectromechanical Systems....Pages 658-661 Why is (111) Silicon a Better Mechanical Material for MEMS?....Pages 662-665 Analyzing Fluid Compression Effects in Complicated Micro-machined Devices....Pages 666-669 Physically-based Modeling of Squeeze Film Damping by Mixed Level System Simulation....Pages 670-673 Microdischarge Device Fabricated In Silicon By Micromachining Technique with Pyramidal Cavity....Pages 674-677 Front Matter....Pages 657-657 Using the Pull-In Voltage as Voltage Reference....Pages 678-680 Front Matter....Pages 681-681 Parallel Linear Actuator System with High Accuracy and Large Stroke....Pages 682-685 A High-Frequency, High-Stiffness Piezoelectric Micro-Actuator for Hydraulic Applications....Pages 686-689 A Monolithic Piezoelectric Miniature Robot with 5 DOF....Pages 690-693 A Novel Micromachined Electromagnetic Loudspeaker for Hearing Aid....Pages 694-697 An Active Guide Wire With Shape Memory Alloy Bending Actuator Fabricated By Room Temperature Process....Pages 698-701 The Floating Mass Vibration Transducer Using Polyimide Elastic Body for Implantable Hearing Aid....Pages 702-705 Bistable thin film composites with TiHfNi-shape memory alloys....Pages 706-709 SMA Microgripper System....Pages 710-713 Compliant MicroTransmissions for Rectilinear Electrothermal Actuators....Pages 714-717 Bulk Micromachined Durable Air-Flow Microactuator Array for Robust Conveyance Systems....Pages 718-721 A New Micro Pneumatic Actuator for Micromechanical Systems....Pages 722-725 Influence of Elastic Deformation in Surface Acoustic Wave Motor Friction Drive....Pages 726-729 Front Matter....Pages 731-731 Design, Fabrication and Testing of New Comb Actuators Realizing Three-Dimensional Continuous Motions....Pages 732-735 Optimal Shape Design for Electrodes of a Rotary Microactuator....Pages 736-739 Electrostatically-Driven-Leverage Actuator as an Engine for Out-of-plane Motion....Pages 740-743 Self-reciprocating Radioisotope-powered Cantilever....Pages 744-747 A Micromechanical Switch with Electrostatically Driven Liquid-Metal Droplet....Pages 748-751 Fabrication of Micro XY-Stage with Large-Area Rectangular Shuttle using Anodic Bonding Process....Pages 752-755 A Novel Electrostatic Vertical Actuator Fabricated in one Homogeneous Silicon Wafer Using Extended SBM Technology....Pages 756-759 Front Matter....Pages 731-731 New Current Drive Method to Extend the Stable Operation Range of Electrostatic Actuators: Experimental Verification....Pages 760-763 3D Self-assembled Micro-actuators for Optical Applications....Pages 764-767 Front Matter....Pages 769-769 The Emergence of Physical Chemosensors and Biosensors....Pages 770-775 MEMS Spectrometer for Infrared Gas Analysis based on a Tunable Filter of Porous Silicon....Pages 776-779 A Photoacoustic Gas Sensing Silicon Microsystem....Pages 780-783 High-Q Factor RF Planar Microcoils on Glass Substrates for NMR Spectroscopy....Pages 784-787 Micromachined Mass Spectrometer....Pages 788-791 Front Matter....Pages 793-793 Design and fabrication of a Hydrodynamic Chromatography Chip....Pages 794-797 Chemical Images by an Artificial Olfactory Bulb....Pages 798-801 Miniaturized Flame Ionization Detector for Gas Chromatography....Pages 802-805 New Type of Thermal Conductivity Sensor for Gas Detection....Pages 806-809 Impedance Imaging of Chemical and Biochemical Systems....Pages 810-813 Front Matter....Pages 815-815 Preparation of Thermally Stable Mesoporous Tin Oxide as a Semiconductor Gas Sensor Material....Pages 816-819 Silicon Planar Microcalorimeter Employing Nanostructured Films....Pages 820-823 Screen Printed Metal Oxide Gas Sensors with Microminiature Gas Separation Systems....Pages 824-827 Group III-Nitride based Gas Sensors for Exhaust Gas Monitoring....Pages 828-831 Pt/CeO2 SIC Schottky diodes with high response to hydrogen and hydrocarbons....Pages 832-835 Comparison of Single and Binary Oxide MoO3, TiO2 and WO3 Sol-gel Gas Sensors....Pages 836-839 Gas Sensing Properties of P-type Semiconducting Cr-doped TiO2 Thin Films....Pages 840-843 Polysilicon mesoscopic wires coated by Pd as high sensitivity H2 sensors....Pages 844-847 Front Matter....Pages 815-815 New Material for Thin Film Filament of Micromachined Hot-plate....Pages 848-851 Front Matter....Pages 853-853 Microsystems in Space Exploration....Pages 854-857 A Hybrid Cold Gas Microthruster System for Spacecraft....Pages 858-861 High-Density Micromachined Acoustic Ejector Array For Micro Propulsion....Pages 862-865 “Water Needle”—A New Phenomenon for Ink-Jet Printing....Pages 866-869 A High-Impulse Low-Power Microthruster Using Liquid Propellant with High-Viscous Fluid-Plug....Pages 870-873 A Micromachined Monolithic Inkjet Print Head with Dome Shape Chamber....Pages 874-877 A Surface Micromachined Electrostatic Drop Ejector....Pages 878-881 Performance Improvement in Dome Jet Inkjet Print Head by Measuring Temperature of Heater....Pages 882-885 Front Matter....Pages 887-887 The Optimized SMA Micro Pump Chip Applicable to Liquids and Gases....Pages 888-891 A Micromachined Silicon Low-Voltage Parallel-Plate Electrokinetic Pump....Pages 892-895 Pneumatic Silicon Microvalves with Piezoelectric Actuation....Pages 896-899 Electrostatic Microvalves in Silicon with 2-Way-Function for Industrial Applications....Pages 900-903 Micro Flow Switches Using Thermal Gelation of Methyl Cellulose for Biomolecules Handling....Pages 904-908 Batch Fabrication of Silicon Micropumps....Pages 908-911 High-Speed and Bi-Stable Electrolysis-Bubble Actuated Gate Valves....Pages 912-915 Front Matter....Pages 917-917 A Pneumatically-Actuated Silicon Microvalve and its Application to Functional Fluidic Integrated Circuits....Pages 918-921 Characterization of a Micro-Mixing, Pumping, and Valving System....Pages 922-925 Smart Passive Microfluidic Systems Based on Ferrofluids for μTAS Applications....Pages 926-929 A Frequency Addressable Ultrasonic Microfluidic Actuator Array....Pages 930-933 Front Matter....Pages 917-917 Stainless Steel-Based Integrated Mass-Flow Controller for Reactive and Corrosive Gases....Pages 934-937 Thermal Bubble Powered Microfluidic Mixer with Gas Bubble Filter....Pages 938-941 A Portable Drug Delivery System with Silicon Capillaries as Key Components....Pages 942-945 Development of a High Density, Planar, Modular Microfluidic Interconnect System....Pages 946-949 Front Matter....Pages 951-951 Epitaxial Technology for MEMS Applications....Pages 952-955 Novel Low-Temperature CVD Process for Silicon Carbide MEMS....Pages 956-959 Poly SiGe, a Promising Material for MEMS Post-Processing on Top of Standard CMOS Wafers....Pages 960-963 A Bonded-Micro-Platform Technology for Modular Merging of RF MEMS and Transistor Circuits....Pages 964-967 Front Matter....Pages 969-969 Performance Characterization of Ultra-Thin N-Type Piezoresistive Cantilevers....Pages 970-973 Single Crystalline Silicon Nano Wire Piezoresistors for Mechanical Sensors....Pages 974-977 The temperature-stable piezoelectric material GaPO4 and its sensor applications....Pages 978-981 Thermophysical Characterisation of PolySi0.7Ge0.3 for Use in Thermoelectric Devices....Pages 982-985 Investigation of 4H-SiC as a New Material for Hall or Temperature Sensors Working up to 500 °C....Pages 986-989 PZT thin films for piezoelectric micro-actuator applications....Pages 990-993 High Aspect Ratio Soft Micromolding of Piezoceramic Thick Films....Pages 994-997 Properties of 1–3 PZT Composite for Ultrasonic Transducer Array Fabricated by Micro-pressing and Dicing Methods....Pages 998-1001 Front Matter....Pages 1003-1003 Low Force Electrical Contact Measurements Using Piezoresistive MEMS Cantilevers to Characterize Thin-Film Metallization....Pages 1004-1007 Analysis and Experiments for Evaluating Adhesion of Arbitrary-Shaped Microstructures using Optimization Method....Pages 1008-1011 Controlled Part-to-Substrate Micro-Assembly via Electrochemical Modulation of Surface Energy....Pages 1012-1014 Ultrahydrophobic Surface Selectively Modified by Pulse Electrodeposition from Aqueous Dispersion of PTFE Particles....Pages 1015-1019 Front Matter....Pages 1003-1003 Conformal Coating Process of Anti-sticking Thin Film Using C4F8 and Ar Plasma without Additional Equipment....Pages 1020-1023 Front Matter....Pages 1025-1025 The “Millipede”—More than 1000 Tips for Parallel and Dense Data Storage....Pages 1026-1029 Microsystem for Vertical Profile Measurement of High Aspect-ratio Microstructures....Pages 1030-1033 Nanometric Sensing and Processing with Micromachined Functional Probe....Pages 1034-1037 Fabrication and Properties of Ultra Small Si Wire Arrays by Vapor-Liquid-Solid Growth with Circuits....Pages 1038-1041 Formation of ultra-shallow p+/n junctions using BF2 implantation for the fabrication of improved piezoresistive cantilevers....Pages 1042-1045 CMOS 10-Cantilever Array for Constant-Force Parallel Scanning AFM....Pages 1046-1049 On a MEMS-Based Parametrically Amplified Atomic Force Sensor....Pages 1050-1053 A Longitudinally Vibrating Touch Probe Sensor Using PZT Thin Film Vibrator....Pages 1054-1057 Fabrication of a Nanoneedle Array....Pages 1058-1060 Fabrication of Various Shapes Nano Structure using Si Anisotropic Etching and Silicidation....Pages 1062-1063 Front Matter....Pages 1065-1065 A 10-MHz Micromechanical Resonator Pierce Reference Oscillator for Communications....Pages 1066-1069 High Q Achieved in Microwave Inductors Fabricated by Parallel Self-Assembly....Pages 1070-1073 14 MHz Micromechanical Oscillator....Pages 1074-1077 Much Enlarged Resonant Amplitude of Micro-resonator with Two-degree-of-freedom (2-DOF) Mechanical Coupling Scheme....Pages 1078-1081 Embedded Solenoid Inductors for RF CMOS Power Amplifiers....Pages 1082-1085 Measurement Techniques for Capacitively-Transduced VHF-to-UHF Micromechanical Resonators....Pages 1086-1089 Front Matter....Pages 1090-1093 Honeycomb-Shaped Deep-Trench Oxide Posts Combined with the SBM Technology for Micromachining Single-Crystal Silicon Without Using SOI....Pages 1095-1095 A Novel High Aspect Ratio Technology for MEMS Fabrication Using Standard Silicon Wafers....Pages 1096-1099 Front Matter....Pages 1100-1103 Pillar Structures with the Space of Sub-Microns Fabricated by the Macroporous Based Micromachining....Pages 1095-1095 Extension of Surface/Bulk Micromachining: One-Mask Fabrication Technology Enabling the Integration of 6-DoF Inertial Sensors on a Single Wafer....Pages 1104-1107 Three-Dimensional Micromachining of Silicon Nitride for Power Microelectromechanical Systems....Pages 1108-1111 Front Matter....Pages 1112-1115 Disposable Plastic Microfluidic Arrays for Applications in Biotechnology....Pages 1117-1117 Droplet Manipulation on a Superhydrophobic Surface for Microchemical Analysis....Pages 1118-1121 Hydrodynamic Adressing; A Flow Cell for Improved Signal Quality in Bioanalytical Systems....Pages 1122-1125 Microfluidic Chips with MxN Continuous Sample Introduction Function Using Hydrodynamic Flow Switching....Pages 1126-1129 PMMA (Poly-Methylmethacrylate) Microchips for On-line DNA Preconcentration and Electrophoresis....Pages 1130-1133 Glass-Silicon Bonding Technology with Feed-Through Electrodes for Micro Capillary Electrophoresis....Pages 1134-1137 Polycarbonate-Based Capillary Electrophoresis Devices for DNA Analysis....Pages 1138-1141 High Aspect Ratio Channels for Capillary Electrophoresis....Pages 1142-1145 Experimental verification of an improved method for conductivity detection in on-chip capillary electrophoresis systems....Pages 1146-1149 Si Based Thin-Film Filter with High Visible-Over-UV Selectivity for Biochemical Fluorescence Analysis....Pages 1150-1153 A Chemiluminescence-Based Multi-Sensor System for the Analytical Detection of Gases....Pages 1154-1157 On-chip impedance-spectroscopy for flow-cytometry using a differential electrode sensor....Pages 1158-1161 Multi-Inlet Chip for Electrokinetic Immunometric Heterogeneous Immunoassay....Pages 1162-1165 A Durable Sensor for Blood Cell Counter Using MEMS Technology....Pages 1166-1169 Manufacturing and Integration of Diffractive Optical Elements with Microfluidic CD Devices....Pages 1170-1173 Characterization of a Mixing Layer Microdevice....Pages 1174-1176 Fabrication of Flexible, Implantable Microelectrodes with Embedded Fluidic Microchannels....Pages 1178-1181 Front Matter....Pages 1182-1185 Microfluidic Bioanalysis Cartridge with Interchangeable Microchannel Separation Components....Pages 1117-1117 Universal integrated diagnostic sample preparation for rapid quantitative and qualitative nucleic acid analysis....Pages 1186-1189 Front Matter....Pages 1190-1193 A Foldable Artificial Lens with an Integrated Transponder System for Measuring Intraocular Pressure....Pages 1195-1195 Design of a Self-Contained 3D microvalve in PDMS....Pages 1196-1199 Novel Liquid Injection Method with Wedge-Shaped Microchannel on a PDMS Microchip System for Diagnostic Analyses....Pages 1200-1203 Modular biosystem for the culture and characterisation of scarce epithelial cell tissues....Pages 1204-1207 A New Fixed-Volume Metering Microdispenser Module based on sPROMs Technology....Pages 1208-1211 Front Matter....Pages 1212-1215 Improved Recovery Time for ISFET Glucose Sensor....Pages 1217-1217 A Simple pH Detector Based on an Organic Field-Effect Transistor....Pages 1218-1221 Single Drop Acid-Rain Analysis Using Microsensors....Pages 1222-1225 Study of Gas Ionization Schemes for Micro Devices....Pages 1226-1229 Thermolysin as a Recognition Element for Microdetermination of Zinc(II) Ions Based on the Apoenzyme Reactivation Methods....Pages 1230-1233 Front Matter....Pages 1234-1237 Increasing Probability of a Success for High-Tech Startup Companies....Pages 1239-1239 Competitive Position of the Micro System Technologies for Wavelength Handling in all-optical Networks for Telecom....Pages 1240-1247 Development of Micro-machined Three-axis Sensors in Venture Business....Pages 1248-1251 MEMS Commercialization: Slow but Steady....Pages 1252-1255 Front Matter....Pages 1256-1259 Micromirrors for Adaptive-Optics Arrays....Pages 1261-1261 Dual-Mode micromirrors for Optical Phased Array Applications....Pages 1262-1265 Torsional Micromirrors with Lateral Actuators....Pages 1266-1269 Micromachined multi-lever linkage angular motion amplifier....Pages 1270-1273 Front Matter....Pages 1274-1277