Towards Synthesis of Micro-/Nano-systems: The 11th International Conference on Precision Engineering (ICPE) August 16-18, 2006, Tokyo, Japan (Jspe Publication Series)

At the beginning of the 21 st century, manufacturing industry is faced with new challenges stemming from globalization and the need for environmental sustainability. The progress of micro-/nano technology means that precision engineering is now considered to be one of the core disciplines necessary for coping with the sometimes severe requirements of new product and system development. From basic research to practical applications, advanced process-technological methods for the design and synthesis of micro-/nano-systems are becoming more and more important. This collection of papers, presented at 11 th International Conference on Precision Engineering, includes high-quality papers for industrial and scientific sources, discusses leading-edge technologies and forecasts future trends. Topics covered include but are not limited to: • advanced manufacturing systems; • ultra-precision- and micro-machining; • nanotechnology for fabrication and measurement; • rapid prototyping and production technology; • new materials and advanced processes; • computer-aided production engineering; • manufacturing process control; • planning and scheduling for production and • CAD/CAE/CAM. Taken together, this volume is an up-to-date source of knowledge, a basis of further work for researchers and scientists, and also a good reference for graduate students in studying ideas and techniques related to precision engineering. Merging Technologies for Optics....Pages 1-9 Fast Tool Servos: Advances in Precision, Acceleration, and Bandwidth....Pages 11-19 Microsystem Technologies for Automotive Applications....Pages 21-27 Study on Manufacturing Method to Reduce Cogging Torque of Motor with Separate Core....Pages 95-100 A High Power and Precision Ultrasonic Linear Motor with Lateral Flexible Supports....Pages 101-106 A Precise Motion Measurement of a Miniature Robot Driven by the Deformation of Piezoelectric Actuators....Pages 107-112 Development of IVUS (Intravascular Ultrasound) Driven by Ultrasonic Micromotor —Principle of Drive and Detection Methods—....Pages 113-116 Development of Membrane Driven Micropump —Principle of Microbubble Driving Mechanism and Prototype—....Pages 117-120 A 3-DOF Rotational Precision Positioning Stage using Spring-mounted PZT Actuators....Pages 121-126 System Concept and Innovative Component Design for Ultra-Precision Assembly Processes....Pages 29-34 Development of a Design Tool for Machine Tools Combining Conceptual Design Support and Detail Design Method....Pages 35-40 Precision Contouring Control of Multi-Axis Feed Drive Systems....Pages 41-46 Areal Gear Flank Description as a Requirement for Optical Gear Metrology....Pages 47-52 Detecting Perturbation Occurrence during Walking....Pages 53-57 Supporting the Reuse of Parts Based on Operation Histories of Products and Preference of Consumers....Pages 59-63 Multi-objective Reactive Scheduling Based on Genetic Algorithm....Pages 65-70 Ultraprecision Wide-angle Profile Measurement with Air-bearing Cylinder Slant Probes....Pages 71-76 Development of a Laser-Guided Deep-Hole Measuring System: Autocollimation System....Pages 77-82 Development of an Optical Measuring Device for Rotation Accuracy of Micro-Spindle —Application to Measurements of a High-Speed Spindle—....Pages 83-88 Laser Interferometric Measurement of Involute Profile by Rolling of Artifact....Pages 89-93 Selective Anodising Technologies for Obtaining Translucent Micro Structures....Pages 175-179 Development of Rectangular Microblasting Nozzle....Pages 181-186 Thick SU-8 Mask for Micro Channeling of Glass by using Micro Abrasive Jet Machining....Pages 187-190 Fabrication of Self-assembled Microstructure using Controlled Liquid Spreading on Textured Surface....Pages 191-196 Improving Performance of Direct Photosynthetic/Metabolic Micro Bio Fuel Cell (DPBFC) by Gene Manipulation of Bacteria....Pages 197-201 Nanometer Deflection Control of AFM Probe by Irradiating Polarized Laser and its Application to Nano-Structuring Process....Pages 203-207 Investigation on Fabricating 3D Structures Using Inkjet Printing Technology....Pages 209-213 Miniaturization of Dot Pattern by Metal Forming for Direct Marking of 2D Barcode Symbols....Pages 215-219 Active Damping of a Wafer Loading Robot using Piezoceramic Actuators....Pages 127-132 Plasma Etching Based Processes for the Fabrication of Micro Structured Linear Guide....Pages 221-225 Ultraprecision Finishing of Photomask Substrate by Utilizing Atmospheric Pressure Plasma....Pages 227-231 Development of Ultra Precision Finishing Method for Quartz Crystal Wafer Utilizing Atmospheric Pressure Plasma....Pages 233-237 Sub-nanometer Smoothing of Diamond-turned Metal Surfaces using Ion Beams....Pages 239-242 Visual Feedback Control of a Micro Lathe....Pages 133-137 An 8-Axis Robot Based Rough Cutting System for Surface Sculpturing....Pages 139-144 A New Position Surveying System for the Underground Pipes Using Two Rotary Encoders....Pages 145-150 Measurement of Cutting Torque by Speed Increasing Spindle....Pages 151-156 Diamond Turning using Water Drive Spindle....Pages 157-161 Development and Evaluation of a High-Precision Machining Center with Friction-Less Drives....Pages 163-167 Machining Feature-Driven 5-Axis CNC Machine Tools....Pages 169-174 Laser Machining of Cobalt Cemented Tungsten Carbides....Pages 243-248 Study of Thermal Deformation of a Base Sheet Caused by Laser Cutting....Pages 249-254 Laser Welding of Transparent Resin Plates....Pages 255-259 Fabrication of Carbon Nanotube Reinforced Hydroxyapatite Coating on Stainless Steel 316L by Laser Surface Treatment....Pages 261-265 Novel Abrasive-free Planarization of Si and SiC using Catalyst....Pages 267-270 Polishing of Single Crystal SiC with the LHA Pad....Pages 271-275 A Computational Study on Slurry Flow between a Wafer and CMP Pad with Grooves....Pages 277-280 Multilevel Computer Generated Hologram on a Curved Surface for High Power CO 2 Laser Beam Shaping....Pages 281-284 Milling-Combined Laser Metal Sintering System and Production of Injection Molds with Sophisticated Functions....Pages 285-290 Development of Optical Elements with ELID-grinding and MRF Synergistic Finishing Process....Pages 291-294 Fabrication of Ultraprecisely Figured Mirror for Nano Focusing Hard-x-ray....Pages 295-300 Surfaces Formation of Precision ELID Grinding Rock Minerals....Pages 301-304 Dressing of Coarse-Grained Diamond Wheels for Ductile Machining of Brittle Materials....Pages 305-307 Study on Subsurface Damage Generated in Ground Si Wafer....Pages 309-313 Fabrication of High-quality Surfaces on Precise Lens Mold Materials by a new ELID Grinding Wheel....Pages 315-318 A GA-based Optimization of Compliant Micro-manipulator....Pages 319-320 Path Control Scheme for Vision Guided Micro Manipulation System....Pages 321-322 Machined Surface Analysis for 5-axis Machine Tools....Pages 323-324 A New Approach Manufacturing Cell Scheduling based on Skill-based Manufacturing Integrated to Genetic Algorithm....Pages 325-326 Slide-bending Formation of Thin Metal Sheet by Using an Industrial Robot....Pages 327-328 High Accuracy and High Capacity Motor Cooling System Using Phase Change of Refrigerant for Semiconductor Lithography Apparatus....Pages 329-330 Development of the Earthworm Robot using a Shape Memory Alloy....Pages 331-332 Improvement of Propulsion Mechanism based on the Inertial Force....Pages 333-334 A High-order Spline Filter for Surface Roughness Measurement....Pages 335-336 Surface structure of monocrystalline silicon anisotropically etched with the help of microwaves....Pages 337-338 Development of an Ultra-Thin 100 μm Diametrical Coaxial Cable using a Coating Technique....Pages 339-340 Study on Si Wafer Cooling by Low Pressure Argon Gas in Vacuum Eenvironment....Pages 341-342 Research on Development of Advanced Analyzer Components with Ultraprecision....Pages 343-344 Effects of Wear of Single Crystal Diamond Tool with Large Nose Radius on Work Hardening and Residual Stress....Pages 345-346 Experimental Analysis and Optimization of Cutting Parameters for End Milling Aluminium Alloy....Pages 347-348 Study on the ELID Grinding Forces of Ceramics and Steels....Pages 349-350 Grinding of C/C-SiC Composite in Dry Method....Pages 351-352 Micromachining Characteristics of Sapphire Surface with Fifth Harmonic Nd: YAG Lasers....Pages 353-354 Development of an Automatic Scraping Machine with Recognition for Bearing of Scraped Surfaces — Construction of Automatic Scraping Machine —....Pages 355-356 This collection of papers, presented at the 11th International Conference on Precision Engineering, offers a broader global perspective on the challenges and opportunities ahead. The discussion encompasses leading-edge technologies and forecasts future trends. Coverage includes advanced manufacturing systems; ultra-precision- and micro-machining; nanotechnology for fabrication and measurement; rapid prototyping and production technology; new materials and advanced processes; computer-aided production engineering; manufacturing process control; production planning and scheduling, and much more.