Sputtering By Particle Bombardment Ii: Sputtering Of Alloys And Compounds, Electron And Neutron Sputtering, Surface Topography (topics In Applied Physics) (vol 2)

Edited By R. Behrisch ; With Contributions By R. Behrisch ... [et Al.]. Includes Bibliographical References And Indexes. Introduction and overview....Pages 1-10 Sputtering of multicomponent materials....Pages 11-90 Chemical sputtering....Pages 91-146 Sputtering by electrons and photons....Pages 147-178 Sputtering of solids with neutrons....Pages 179-229 Heavy ion sputtering induced surface topography development....Pages 231-269 Development of surface topography due to gas ion implantation....Pages 271-355 Sputtering is a widely observed phenomenon that has many applications in today's experimental physics and technology. This text considers the characterization of the sputtered particles and applications of the technique.