Sensors and Measurement Systems (River Publishers Series in Electronic Materials and Devices)

Sensors and Measurement Systems is an introduction to microsensors for engineering students in the final undergraduate or early graduate level, technicians who want to know more about the systems they are using, and anybody curious enough to know what microsystems and microsensors can do. The book discusses five families of sensors: - Thermal sensors - Force and pressure sensors - Inertial sensors - Magnetic field sensors - Flow sensors For each sensor, theoretical, technology and application aspects are examined. The sensor function is modelled to understand sensitivity, resolution and noise. We ask ourselves: What do we want to measure? What are possible applications? How are the sensor chips made in the cleanroom? How are they mounted and integrated in a system? After reading this book, you should be able to: - Understand important thermal, mechanical, inertial and magnetic sensors - Work with characterization parameters for sensors - Choose sensors for a given application and apply them - Understand micromachining technologies for sensors Capteurs et systèmes de mesure est une introduction aux microcapteurs destinée aux étudiants en ingénierie en fin de premier cycle ou en début de deuxième cycle, aux techniciens qui souhaitent en savoir plus sur les systèmes qu'ils utilisent, et à toute personne suffisamment curieuse pour savoir ce que les microsystèmes et les microcapteurs peuvent faire. Le livre traite de cinq familles de capteurs : - Capteurs thermiques - Capteurs de force et de pression - Capteurs inertiels - Capteurs de champ magnétique - Capteurs de débit Pour chaque capteur, les aspects théoriques, technologiques et applicatifs sont examinés. La fonction du capteur est modélisée pour comprendre la sensibilité, la résolution et le bruit. Nous nous posons les questions suivantes : Que voulons-nous mesurer ? Quelles sont les applications possibles ? Comment les puces des capteurs sont-elles fabriquées en salle blanche ? Après avoir lu ce livre, vous devriez être en mesure de:- Comprendre les principaux capteurs thermiques, mécaniques, inertiels et magnétiques- Travailler avec les paramètres de caractérisation des capteurs- Choisir des capteurs pour une application donnée et les appliquer- Comprendre les technologies de micro-usinage pour les capteurs Sensors and measurement systems is an introduction to microsensors for engineering students in the final undergraduate or early graduate level, technicians who wants to know more about the systems they are using, and anybody curious enough to know what microsystems and microsensors can do. The book discusses five families of sensors: - Thermal sensors - Force and pressure sensors- Inertial sensors - Magnetic field sensors- Flow sensorsFor each sensor, theoretical, technology and application aspects are examined. The sensor function is modelled to understand sensitivity, resolution and noise. We ask ourselves: What do we want to measure? What are possible applications? How are the sensor chips made in the cleanroom? How are they mounted and integrated in a system?After reading this book, you should be able to:- Understand important thermal, mechanical, inertial and magnetic sensors- Work with characterization parameters for sensors- Choose sensors for a given application and apply them- Understand micromachining technologies for sensors __Sensors and Measurement Systems__The book discusses five families of sensors: - Thermal sensors - Force and pressure sensors - Inertial sensors - Magnetic field sensors - Flow sensors For each sensor, theoretical, technology and application aspects are examined. The sensor function is modelled to understand sensitivity, resolution and noise. We ask ourselves: What do we want to measure? What are possible applications? How are the sensor chips made in the cleanroom? How are they mounted and integrated in a system? After reading this book, you should be able to: - Understand important thermal, mechanical, inertial and magnetic sensors - Work with characterization parameters for sensors - Choose sensors for a given application and apply them - Understand micromachining technologies for sensors Front Matter Introduction Chapter 1 Chapter 2 Chapter 3 Chapter 4 Chapter 5 Chapter 6 Index About the Author