Sensor Technology 2001 : Proceedings of the Sensor Technology Conference 2001, Held in Enschede, The Netherlands 14–15 May, 2001

The interest in sensors, especially microsensors, dramatically increased during the last decade of the 20th century. This is due to decreasing prices of microsensors, increasingly more reliable fabrication technology, and wide experience in the design of microsensors. However, the possibilities for new sensor concepts are hardly explored, so the field is also expanding scientifically. We also observe that the applications of sensors is spreading into new fields and incorporation of sensors in complete microsystems has begun to take shape. These proceedings report the newest results of research in sensor technology in The Netherlands and Belgium. They comprise design issues, sensor concepts, fabrication technology, systems aspects and packaging. Special aspects are the discussions of sensors for microfluidic systems as well as sensors for optical systems, integrated optics, and for optical telecommunication. Audience: This book will be of interest to engineers active in the field of sensors, sensor systems, microsystems, and M(O)EMS. Front Matter....Pages i-xii Measurement System for Biochemical Analysis Based on Capillary Electrophoresis and Microscale Conductivity Detection....Pages 1-6 Electro-Osmotic Flow Control in Microfluidics Systems....Pages 7-12 Flow sensing using the temperature distribution along a heated microbeam....Pages 13-18 Temperature-Balance Micro Flow Sensor System Based on a Free Oscillating Differential Power Controller....Pages 19-24 Technology for Spatial Light Modulators Based on Reflective Silicon Structures....Pages 25-30 Building of a Highly Sensitive Two-Channel Integrated Optical Young Interferometer as the First Step Towards Constructing an Integrated Multichannel Interferometer Immunosensor....Pages 31-36 High Speed Integrated CMOS Wavefront Sensor....Pages 37-42 Automotive Sensor Development: Success Guaranteed?....Pages 43-45 Study on the Behaviour of Various Substrate Geometries for Use As Passive Heat Sink....Pages 47-52 Transfer Mould Packaging for Sensors....Pages 53-58 Inexpensive MEMS Packaging....Pages 59-64 Low-Cost System to Determinate the X-Y Position in a Resistive Touch-Screen....Pages 65-69 High Capacity Silicon Load Cells....Pages 71-76 Thermopile Design for a CMOS Wind-Sensor....Pages 77-82 Investigation of Relative Humidity Sensors Based on Porous Silicon, Porous Polysilicon and Porous Silicon Carbide....Pages 83-88 Limitations and Complementary Value of Cryogenic SF 6 -O 2 and Bosch Plasma Etch Process for Silicon Micromachining....Pages 89-94 Fabrication of Mechancial Structures Using Macro-Porous Silicon....Pages 95-100 Fine Tuning the Surface Roughness of Powder Blasted Glass Surfaces....Pages 101-106 On the Feasibility of Using Antifuses as Low-Power Heating / Detecting Elements in Pellistor-Type Gas Sensors....Pages 107-112 Amperometric Sensor for Detection of Redox Activity....Pages 113-118 Accurate Quantitative Measurement of E-Field Distributions in “Solid” Phantoms Using a Flexible Schottky Diode Sheet....Pages 119-124 A Simple Selfpriming Bubble-Tolerant Peristaltic Micropump....Pages 125-129 HF Etching of Si-Oxides and Si-Nitrides for Surface Micromachining....Pages 131-136 A Light Absorption Cell for μ-TAS with KOH/IPA Etched 45° Mirrors in Silicon....Pages 137-142 A Low-Cost and Accurate Conductance-Measurement System....Pages 143-147 An Improved Sensor-Actuator System for Dynamic Surface Tension Measurements....Pages 149-154 DNA Condensation Caused by Ligand Binding May Serve as a Sensor....Pages 155-160 Forming a Rounded Convex Corner by Using Two-Step Anisotropic KOH Wet Etching....Pages 161-166 An Accurate Measurement System for Thermopiles....Pages 167-172 Packaged Stainless Steel Flowsensor....Pages 173-178 Micro-Machining of a Cryogenic Imaging Array of Transition Edge X-Ray Microcalorimeters....Pages 179-184 Enzyme Immobilisation Studies for Sensor Applications....Pages 185-189 Micromachined Si-Well Scintillator Pixel Sensors for Thermal Neutron Detection....Pages 191-196 Back Matter....Pages 197-200 The 2001 Dutch Sensor Conference held on 14 -15 May 2001, at the University of Twente in Enschede, The Netherlands, is the fourth in a series ofmeetings. The conference is initiated by the Dutch Technology Foundation (STW) in order to stimulate the industrial application ofsensor research. This MESA Monograph contains a collection oflatest research and development from all major Dutch centers ofsensor research and aspect ofsensor commercialization. Thus it provides an excellent overview ofthe state ofthe art ofDutch Sensor Technology in the new millennium. I should like to acknowledge the work ofthe program committee, the local organizing committee and, ofcourse, the contributors to this volume. All ofthem made the conference a success. Prof. Dr. Miko Elwenspoek Conference Chairman Program Committee: M. Elwenspoek (Chairman) (MESA+) A.van den Berg (MESA+) PJ. French (TV Delft) P.V. Lambeck (MESA+) H. Leeuwis (3T) J.c. Lotters (Bronkhorst) HAC. Tilmans (IMEC) Contents MEASUREMENT SYSTEM FOR BIOCHEMICAL ANALYSIS BASED 1 ON CAPILLARY ELECTROPHORESIS AND MICROSCALE CONDUCTIVITY DETECTION F. Laugere, A. Berthold, R.M Guijt, E. Baltussen, J. Bastemeijer, P.M Sarro, MJ. Vellekoop ELECTRO-OSMOTIC FLOW CONTROL IN MICROFLUIDICS 7 SYSTEMS R.E. Oosterbroek,MH. Goedbloed, A. Trautmann, N.J. van der Veen, S Schlautmann, 1.W Berenschot, A. van den Berg FLOW SENSING USING THE TEMPERATURE DISTRIBUTION 13 ALONG A HEATED MICROBEAM J.J. van Baar, RJ Wiegerink,GJM Krijnen, T.SJ. Lammerink, M.C The interest in sensors, especially microsensors, dramatically increased during the last decade of the 20th century. This is due to decreasing prices of microsensors, increasingly more reliable fabrication technology, and wide experience in the design of microsensors. However, the possibilities for new sensor concepts are hardly explored, so the field is also expanding scientifically. We also observe that the applications of sensors is spreading into new fields and incorporation of sensors in complete microsystems has begun to take shape. These proceedings report the newest results of research in sensor technology in The Netherlands and Belgium. They comprise design issues, sensor concepts, fabrication technology, systems aspects and packaging. Special aspects are the discussions of sensors for microfluidic systems as well as sensors for optical systems, integrated optics, and for optical telecommunication. __Audience:__ Proceedings of the Sensor Technology Conference 2001, Enschede, The Netherlands, 14-15 May 2001