Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics

Content: Preface , Pages v-vi 1 - Introduction , Pages 14-19 2 - Industrial Hygiene Monitoring , Pages 20-103 3 - Industrial Hygiene Monitoring: Physical Agents , Pages 104-139 4 - Ventilation , Pages 140-176 5 - Personal Protective Equipment (PPE) , Pages 177-195 6 - Indoor Air Quality (IAQ) , Pages 196-219 7 - Ergonomics , Pages 220-243 8 - Industrial Hygiene Recordkeeping , Pages 244-247 9 - Plan Review , Pages 248-257 Appendix A - Silicon Ingot and Wafer Manufacturing , Pages 259-266 Appendix B - Silicon Device Manufacturing Introduction , Pages 267-297 Appendix C - III–V (GaAs) , Pages 298-307 Appendix D - III–V Device , Pages 308-313 Appendix E - Ion Implanter Maintenance Safety Considerations , Pages 314-318 Appendix F - Bibliography , Pages 319-320 Glossary and Acronyms , Pages 321-342 Index , Pages 343-361 The Semiconductor Industrial Hygiene Handbook provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The sections on electromagnetic fields (EMF), odor investigations, ventilation systems, and ergonomics, are specific to the semiconductor industry. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry. An extensive bibliography is included for the reader who wants more in-depth information. This comprehensive book provides the latest information on semiconductor industrial hygiene topics, and is an invaluable single source of information for the industrial hygienist, researcher, facilities engineer, or semiconductor environmental health and safety professional. This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry. Additional detail is provided on semiconductor processing technology through silicon and Ill-Y process descriptions. Lastly, an extensive bibliography on processing technology for semiconductors is included to give the reader more in-depth process information. Michael Williams and David Baldwin are two of the premier industrial hygienists in the semiconductor industry. Paul Manz provided information on continuous gas monitoring. Content: Preface, __Pages v-vi__1 - Introduction, __Pages 14-19__2 - Industrial Hygiene Monitoring, __Pages 20-103__3 - Industrial Hygiene Monitoring: Physical Agents, __Pages 104-139__4 - Ventilation, __Pages 140-176__5 - Personal Protective Equipment (PPE), __Pages 177-195__6 - Indoor Air Quality (IAQ), __Pages 196-219__7 - Ergonomics, __Pages 220-243__8 - Industrial Hygiene Recordkeeping, __Pages 244-247__9 - Plan Review, __Pages 248-257__Appendix A - Silicon Ingot and Wafer Manufacturing, __Pages 259-266__Appendix B - Silicon Device Manufacturing Introduction, __Pages 267-297__Appendix C - III–V (GaAs), __Pages 298-307__Appendix D - III–V Device, __Pages 308-313__Appendix E - Ion Implanter Maintenance Safety Considerations, __Pages 314-318__Appendix F - Bibliography, __Pages 319-320__Glossary and Acronyms, __Pages 321-342__Index, __Pages 343-361__ This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry Offers a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. This book contains chapters on industrial hygiene concerns that are not specific to the semiconductor industry. This book was written to provide a practical guide to those individuals responsible for providing industrial hygiene (IH) services to the semiconductor industry.