Proceedings of the NATO Advanced Study Institute on Materials Modification by High-Fluence Ion Beams, Viana do Castelo, Portugal, August 24-September 4, 1987

Proceedings of the NATO Advanced Study Institute on Materials Modification by High-Fluence Ion Beams, Viana do Castelo, Portugal, August 24-September 4, 1987 Front Matter....Pages i-xiv Front Matter....Pages 1-1 High-Fluence Ion Irradiation, an Overview....Pages 3-27 Front Matter....Pages 29-29 Historical Overview on the Fundamentals of Sputtering....Pages 31-81 Depth of Origin of Sputtered Atoms....Pages 83-86 Magnetron Sputtering - Physics and Design....Pages 87-92 On the Formation and Characterization of Microcrystalline Si:H Prepared by RF Magnetron Sputtering....Pages 93-100 Depth Profiling of Ta 2 O 5 thin Layer on Ta Foil by Ion Scattering Spectrometry and Ion Sputtering....Pages 101-108 Bombardment of Alkali and Alkali-Earth Halides by Ions and Electrons....Pages 109-115 Effects of Ar + Angle-of-Incidence on the Etching of Si with Cl 2 and Low-Energy Ar + Ions....Pages 117-121 Irradiation Effects in Ices by Energetic Ions....Pages 123-138 Ion Formation by Very High Energetic Ion Impact on Solids....Pages 139-147 Front Matter....Pages 149-149 Computer Simulation of Stopping and Sputtering....Pages 151-184 Computer Simulation of Ion-Beam Mixing of Cobalt on Silicon....Pages 185-190 On the Fractal Nature of Collision Cascades....Pages 191-203 Simple Statistical Models for Erosion and Growth....Pages 205-214 Front Matter....Pages 215-215 Defects and Defect Processes....Pages 217-230 Fast-Ion-Induced Defects in Silicon Studied by Deep Level Transient Spectroscopy....Pages 231-236 Low Energy (300 eV - 10 keV) Ar + and Cl + Ion Irradiation of (100) Si....Pages 237-243 The Charge State of Iron Implanted into Sapphire....Pages 245-254 Front Matter....Pages 255-255 Direct and Recoil Implantation, and Collisional Ion-Beam Mixing: Recent Low-Temperature Experiments....Pages 257-284 Mixing by Defect-Assisted Migration of Thin Markers in Solids....Pages 285-290 Front Matter....Pages 255-255 The Triumf Optically Pumped Polarized H - Ion Source....Pages 291-294 Some High-Current Ion Sources for Materials Modification....Pages 295-301 Front Matter....Pages 303-303 Bombardment-Induced Compositional Change with Alloys, Oxides, and Oxysalts. I the Role of the Surface Binding Energy....Pages 305-327 Investigation of Preferential Sputtering Mechanisms by Analysing the Sample Surface and Near-Surface Region with AES and ISS....Pages 329-337 High-Fluence Implantation in Insulators. Part I: Compositional, Mechanical, and Optical Changes....Pages 339-356 High-Fluence Implantation in Insulators. Part II: Chemical Changes....Pages 357-383 Electrochemical and Corrosion Behaviour of Ion and Laser—Beam Modified Metal Surfaces....Pages 385-402 Front Matter....Pages 403-403 Ion—Irradiation Induced Phase Changes in Metallic Systems....Pages 405-420 The Topography of Ion-Bombarded Surfaces....Pages 421-466 Cultured Blisters....Pages 467-476 Front Matter....Pages 477-477 Electronic Properties of Ion-Implanted Metals....Pages 479-506 Front Matter....Pages 507-507 Tribology of Implantation Bilayers....Pages 509-533 Adhesive and Abrasive Wear Study of Nitrogen Implanted Steels....Pages 535-540 Effect of α-Recoil Damage on the Elastic Moduli of Zircon and Tourmaline....Pages 541-545 Depth-Resolved Investigation of Structural Transformations and Hardness Variations in Implanted Films on Bulk Samples....Pages 547-556 Front Matter....Pages 557-557 Laser Etching as an Alternative....Pages 559-579 Pulsed Laser Irradiation of Heavily Ge Implanted Silicon....Pages 581-588 Back Matter....Pages 589-597 This volume is the proceedings of a NATO Advanced study In­ stitute held at the Hotel do Parque in Viana do Castelo (Portugal). The school was directed by Roger Kelly (U.S.A.) and M. Fernanda da Silva (Portugal), and the organizing committee consisted of Harry Bernas (France), George Carter (U.K.), Paolo Mazzoldi (Italy), and Edmund Taglauer (Germany). The dates were 24 August to 4 September, 1987. The School was conceived to satisfy the needs of those who study particle-surface interactions at high fluence, i.e. under conditions leading to chemical, electronic, mechanical, and structural changes rather than just doping. This community of scientists is surprisingly large even though demonstrated ap­ plications are still relatively few. As such, the community is as much engaged in pure research as In applied work. It is very highly developed in Western Europe but less so in North America. This interesting state of balance has a number of causes, not the least of which is the way in which science is funded in North America: public relations plays a large role