اندازه‌گیری‌های مایکروویو روی ویفر و جداسازی

This new authoritative resource presents the basics of network analyzer measurement equipment and troubleshooting errors involved in the on-wafer microwave measurement process. This book bridges the gap between theoretical and practical information using real-world practices that address all aspects of on-wafer passive device characterization in the microwave frequency range up to 60GHz. Readers find data and measurements from silicon integrated passive devices fabricated and tested in advanced CMOS technologies. Basic circuit equations, terms and fundamentals of time and frequency domain analysis are covered. This book also explores the basics of vector network analyzers (VNA), two port S-parameter measurement routines, signal flow graphs, network theory, error models and VNA calibrations with the use of calibration standards. 1 Measurement Equipment 2 Network Analyzer Basics and Calibration 3 Silicon Integrated Passive Devices 4 OnWafer DeEmbedding Methods 5 Experimental Device Characterizationin CMOS 6 A Recipe for Successful OnWafer Characterization A Network Theory and Device Metrics