Nondestructive evaluation of semiconductor materials and devices : [lectures presented at the NATO Advanced Study Institute on Nondestructive Evaluation of Semiconductor Materials and Devices, held at the Villa Tuscolano, Italy, September 19-29, 1978

From September 19-29, a NATO Advanced Study Institute on Non­ destructive Evaluation of Semiconductor Materials and Devices was held at the Villa Tuscolano in Frascati, Italy. A total of 80 attendees and lecturers participated in the program which covered many of the important topics in this field. The subject matter was divided to emphasize the following different types of problems: electrical measurements; acoustic measurements; scanning techniques; optical methods; backscatter methods; x-ray observations; accele­ rated life tests. It would be difficult to give a full discussion of such an Institute without going through the major points of each speaker. Clearly this is the proper task of the eventual readers of these Proceedings. Instead, it would be preferable to stress some general issues. What came through very clearly is that the measurements of the basic scientists in materials and device phenomena are of sub­ stantial immediate concern to the device technologies and end users. Front Matter....Pages i-xi Two-Probe (Spreading Resistance) Measurements for Evaluation of Semiconductor Materials and Devices....Pages 1-66 Four-Terminal Nondestructive Electrical and Galvanomagnetic Measurements....Pages 67-104 Characterization of Surface States at the Si-SiO 2 Interface....Pages 105-148 Steady-State and Non-Steady-State Characterization of MOS Devices....Pages 149-199 Semiconductor Material Evaluation by Means of Schottky Contacts....Pages 201-256 Noise....Pages 257-314 Optical Characterization of Semiconductors....Pages 315-395 Use of Photoemission and Related Techniques to Study Device Fabrication....Pages 397-456 Scanned Photovoltage and Photoemission....Pages 457-514 SEM Methods for the Characterization of Semiconductor Materials and Devices....Pages 515-580 Backscattering Spectrometry and Related Analytical Techniques....Pages 581-630 The Acoustic Microscope: A Tool for Nondestructive Testing....Pages 631-676 Non-Destructive Tests Used to Insure the Integrity of Semiconductor Devices with Emphasis on Passive Acoustic Techniques....Pages 677-738 Lifetime Data Analysis....Pages 739-769 Back Matter....Pages 771-782