حسگرهای مکانیکی MEMS

Here’s the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing. This new resource explores all the major areas of mechanical microsensors and takes an especially close look at pressure and inertial sensors. Engineers in industry and academia can tap into current and future market trends in such key applications areas for mechanical microsensors as force and torque, flow in microfluidics, and displacement. A thorough introduction to physical sensors, MEMS, and the properties of silicon brings you up to speed with the state of the art of this groundbreaking technology. Cover......Page 1 Contents......Page 6 Preface......Page 10 1.1 Motivation for the Book......Page 12 1.2 What Are MEMS?......Page 13 1.3 Mechanical Transducers......Page 14 1.4 Why Silicon?......Page 15 References......Page 16 2.2.1 Substrates......Page 18 2.3 Fabrication Techniques......Page 22 2.3.1 Deposition......Page 23 2.3.2 Lithography......Page 28 2.3.3 Etching......Page 32 2.3.4 Surface Micromachining......Page 39 2.3.5 Wafer Bonding......Page 40 2.3.6 Thick-Film Screen Printing......Page 43 2.3.7 Electroplating......Page 44 2.3.8 LIGA......Page 45 2.3.10 Electrochemical Etch Stop......Page 46 References......Page 47 3.1 Introduction......Page 50 3.2.1 Behavioral Modeling Simulation Tools......Page 51 3.2.2 Finite Element Simulation Tools......Page 54 References......Page 67 4.1 Introduction......Page 68 4.2.1 Ceramic Packages......Page 69 4.3 Packaging Processes......Page 70 4.3.1 Electrical Interconnects......Page 71 4.3.2 Methods of Die Attachment......Page 74 4.3.3 Sealing Techniques......Page 76 4.4 MEMS Mechanical Sensor Packaging......Page 77 4.4.1 Protection of the Sensor from Environmental Effects......Page 78 4.4.3 Mechanical Isolation of Sensor Chips......Page 82 4.5 Conclusions......Page 91 References......Page 92 5.1 Piezoresistivity......Page 96 5.2 Piezoelectricity......Page 100 5.3 Capacitive Techniques......Page 103 5.4.1 Intensity......Page 105 5.4.2 Phase......Page 106 5.4.5 Frequency......Page 107 5.5 Resonant Techniques......Page 108 5.5.1 Vibration Excitation and Detection Mechanisms......Page 109 5.5.2 Resonator Design Characteristics......Page 110 5.6.1 Electrostatic......Page 115 5.6.3 Thermal......Page 118 5.7 Smart Sensors......Page 120 References......Page 123 6.1 Introduction......Page 124 6.2 Physics of Pressure Sensing......Page 125 6.2.1 Pressure Sensor Specifications......Page 128 6.2.2 Dynamic Pressure Sensing......Page 131 6.3.1 Manometer......Page 132 6.3.3 Bourdon Tube......Page 133 6.4 Diaphragm-Based Pressure Sensors......Page 134 6.4.1 Analysis of Small Deflection Diaphragm......Page 136 6.4.3 Membrane Analysis......Page 138 6.4.4 Bossed Diaphragm Analysis......Page 139 6.4.6 Traditional Diaphragm Transduction Mechanisms......Page 140 6.5.1 Micromachined Silicon Diaphragms......Page 141 6.5.2 Piezoresistive Pressure Sensors......Page 143 6.5.3 Capacitive Pressure Sensors......Page 148 6.5.4 Resonant Pressure Sensors......Page 150 6.5.5 Other MEMS Pressure Sensing Techniques......Page 153 6.6 Microphones......Page 154 References......Page 156 7.1 Introduction......Page 164 7.2 Silicon-Based Devices......Page 165 7.3 Resonant and SAW Devices......Page 168 7.4 Optical Devices......Page 170 7.5 Capacitive Devices......Page 171 7.6 Magnetic Devices......Page 173 7.7 Atomic Force Microscope and Scanning Probes......Page 175 7.8 Tactile Sensors......Page 177 References......Page 179 8.1 Introduction......Page 184 8.2.1 Principle of Operation......Page 186 8.2.2 Research Prototype Micromachined Accelerometers......Page 191 8.2.3 Commercial Micromachined Accelerometer......Page 203 8.3.1 Principle of Operation......Page 206 8.3.2 Research Prototypes......Page 210 8.3.3 Commercial Micromachined Gyroscopes......Page 215 8.4 Future Inertial Micromachined Sensors......Page 217 References......Page 218 CHAPTER 9 Flow Sensors......Page 224 9.1 Introduction to Microfluidics and Applications for Micro Flow Sensors......Page 225 9.2 Thermal Flow Sensors......Page 228 9.2.1 Research Devices......Page 230 9.2.2 Commercial Devices......Page 236 9.3 Pressure Difference Flow Sensors......Page 240 9.4.1 Drag Force......Page 243 9.4.2 Lift Force......Page 246 9.4.3 Coriolis Force......Page 247 9.4.4 Static Turbine Flow Meter......Page 249 9.5.1 Electrohydrodynamic......Page 250 9.5.2 Electrochemical......Page 251 9.6 Flow Sensor Based on the Faraday Principle......Page 252 9.7 Flow Sensor Based on the Periodic Flapping Motion......Page 253 9.8 Flow Imaging......Page 254 9.9.1 Fluid Velocity Measurement......Page 256 9.9.3 Multiphase Flow Detection......Page 257 9.10 Turbulent Flow Studies......Page 258 9.11 Conclusion......Page 259 References......Page 261 About the Authors......Page 268 Index......Page 270 Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors