MEMS and nanotechnology. Volume 4 : proceedings of the 2011 annual conference on experimental and applied mechanics

__MEMS and Nanotechnology__ represents one of eight volumes of technical papers presented at the Society for Experimental Mechanics Annual Conference & Exposition on Experimental and Applied Mechanics, held at Uncasville, Connecticut, June 13-16, 2011. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Mechanics of Biological Systems and Materials, Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials; Optical Measurements, Modeling and, Metrology; Experimental and Applied Mechanics, Thermomechanics and Infra-Red Imaging, and Engineering Applications of Residual Stress. Front Matter....Pages i-viii Integrated process feasibility of hard-mask for tight pitch interconnects fabrication....Pages 1-7 Thermoelectric Effects in Current Induced Crystallization of Silicon Microstructures....Pages 9-16 Evaluation of Resistance Measurement Techniques in Carbon Black and Carbon Nano-tubes Reinforced Epoxy....Pages 17-23 A nano-tensile tester for creep studies....Pages 25-29 The Measurement of Cyclic Creep Behavior in Copper Thin Film Using Microtensile Testing....Pages 31-38 New Insight into Pile-up in Thin Film Indentation....Pages 39-43 Measuring Substrate-Independent Young’s Modulus of Thin Films....Pages 45-51 Analysis of Spherical Indentation of an Elastic Bilayer Using a Modified Perturbation Approach....Pages 53-57 Nano-indentation Studies of Polyglactin 910 Monofilament Sutures....Pages 59-64 Analytical approach for the determination of nanomechanical properties for metals....Pages 65-73 Advances in Thin Film Indentation....Pages 75-81 Cyclic Nanoindentation Shakedown of Muscovite and Its Elastic Modulus Measurement....Pages 83-92 Assessment of Digital Holography for 3D-Shape Measurement of Micro Deep Drawing Parts in comparison to Confocal Microscopy....Pages 93-98 Full-Field Bulge Testing Using Global Digital Image Correlation....Pages 99-103 Experimental Investigation of Deformation Mechanisms Present in Ultrafine-Grained Metals....Pages 105-110 Characterization of a Variation on AFIT’s Tunable MEMS Cantilever Array Metamaterial....Pages 111-118 MEMS for real-time infrared imaging....Pages 119-124 New Insights into Enhancing Microcantilever MEMS Sensors....Pages 125-130 A Miniature MRI-Compatible Fiber-optic Force Sensor Utilizing Fabry-Perot Interferometer....Pages 131-136 Micromechanical Structure With Stable Linear Positive And Negative Stiffness....Pages 137-143 Terahertz Metamaterial Structures Fabricated by PolyMUMPs....Pages 145-150 Investigations Into 1D and 2D Metamaterials at Infrared Wavelengths....Pages 151-158 MEMS integrated metamaterials with variable resonance operating at RF frequencies....Pages 159-166 Creep measurements in free-standing thin metal film micro-cantilever bending....Pages 167-171 MEMS Reliability for Space Applications by Elimination of Potential Failure Modes through Analysis....Pages 173-176 Analysis and Evaluation Methods Associated with the Application of Compliant Thermal Interface Materials in Multi-chip Electronic Board Assemblies....Pages 177-187 Hierarchical Reliability Model for Life Prediction of Actively Cooled LED-Based Luminaire....Pages 189-190 Direct Determination of Interfacial Traction-Separation Relations in Chip-Package Systems....Pages 191-191 MEMS and Nanotechnology, Volume 4 represents one of eight volumes of technical papers presented at the Society for Experimental Mechanics Annual Conference on Experimental and Applied Mechanics, held at Uncasville, Connecticut, June 13-16, 2011. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Mechanics of Biological Systems and Materials, Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials; Optical Measurements, Modeling and, Metrology; Experimental and Applied Mechanics, Thermomechanics and Infra-Red Imaging, and Engineering Applications of Residual Stress. Optical Measurements, Modeling, and Metrology represents one of eight volumes of technical papers presented at the Society for Experimental Mechanics Annual Conference on Experimental and Applied Mechanics, held at Uncasville, Connecticut, June 13-16, 2011.