MEMS and Nanotechnology, Volume 2 : Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics

The 11th International Symposium on MEMS and Nanotechnology is the second volume of six from the Annual Conference of the Society for Experimental Mechanics 2010. It brings together 40 chapters on Microelectromechanical Systems and Nanotechnology. It presents early findings from experimental and computational investigations on MEMS and Nanotechnology including contributions on Nanomechanical Standards, Magneto-mechanical MEMS Sensors, Piezoelectric MEMS for Energy Harvesting, and Linear and Nonlinear Mass Sensing. Front Matter....Pages i-ix Nanomechanical standards based on the intrinsic mechanics of molecules and atoms....Pages 1-7 Magneto-Mechanical MEMS Sensors for Bio-Detection....Pages 9-15 Recent Progress of Piezoelectric MEMS for Energy Harvesting Devices....Pages 17-23 Performance of Piezoelectric Power Generator in Environmental Conditions....Pages 25-31 Comparison of Transduction Efficiency for Energy Harvester between Piezoelectric Modes....Pages 33-39 Size Effects Associated with Microcompression Experiments on Single-Crystal Magnesium....Pages 41-42 Mechanically probing time-dependent mechanics in metallic MEMS....Pages 43-48 Small mass measurements for tuning fork-based atomic force microscope cantilever spring constant calibration....Pages 49-56 Linear and Nonlinear Mass Sensing Using Piezoelectrically-Actuated Microcantilevers....Pages 57-65 Calibrating Force and Displacement in the Face of Property Variation....Pages 67-74 Standardization of Nanoscale Interfacial Experiments Using MEMS....Pages 75-79 Arrays of Robust Carbon Nanotube-Based NEMS: A Combined Experimental/Computational Investigation....Pages 81-82 Electro-Mechanical Response of Carbon Nanotube Reinforced Polymer Composites....Pages 83-84 A Test Platform for Systematic Investigation of Tribology in MEMS....Pages 85-95 Full Optical Scatter Analysis for Novel Photonic and Infrared Metamaterials....Pages 97-105 Thermal Management and Metamaterials....Pages 107-113 MEMS integrated metamaterial structure having variable resonance for RF applications....Pages 115-120 Characterization and Testing of Adaptive RF Metamaterial Structure Using MEMS....Pages 121-127 Design of a microfluidic pump, based on conducting polymers....Pages 129-138 Micromotor Fabrication by Surface Micromachining Technique.....Pages 139-146 Improvement of Piezoresistive Microcantilever Beams for Gas Detection and Sensing....Pages 147-155 Investigation of the Young’s Modulus of Fibers in an Electrospun PCL Scaffold Using AFM and its Correlation to cell Attachment....Pages 157-162 Recent Progress in E-Beam Lithography for SEM Patterning....Pages 163-166 Analysis of Scattering-type Scanning Near-field Optical Microscopy for Residual-strain Measurements....Pages 167-171 Experimental Methods for Tensile Testing of Metallic Thin Films at High Temperatures....Pages 173-180 Surface Texturing Using Gold Nanoparticles to Reduce Adhesion in MEMS....Pages 181-187 Design of Microswitch Systems Avoiding Stiction due to Surface Contact....Pages 189-195 Measurement of adhesive force between two mica surfaces with multiple beam interferometry....Pages 197-201 Performance Studies of A Prototypical MEMS Thermal Actuator....Pages 203-208 A New Electrothermal Microactuator with Z-shaped Beams....Pages 209-213 Electrothermal Actuators for Integrated MEMS Safe and Arming Devices....Pages 215-222 Contrast Reversal on Surface Plasmon Resonance Reflectivity in Nickel and Nickel Alloy Films....Pages 223-228 Effect of Accelerated Ultra Violet and Thermal Exposure on Nano Scale Mechanical Properties of Nylon Fibers....Pages 229-235 High Thermal Conductivity Polyurethane-Boron Nitride Nanocomposite Encapsulants....Pages 237-242 Advanced hard mask approach of ICs copper interconnects processes integration....Pages 243-252 Advances in Thin Film Nanoindentation....Pages 253-260 Mechanical and Piezoelectric Behavior of Thin Film PZT Composites for MEMS Applications....Pages 261-266 Fracture Between Self-Assembled Monolayers....Pages 267-267 Control and Quantification of Residual Stresses in Anodically Bonded MEMS Structures....Pages 269-273 Sub-micron Scale Mechanical Properties of Polypropylene Fibers Exposed to Ultraviolet and Thermal Degradation....Pages 275-281