High Resolution Focused Ion Beams: FIB and Its Applications : The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology

In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject. Front Matter....Pages i-xi Introduction....Pages 1-3 Field Ionization Sources....Pages 5-19 Physics of Liquid Metal Ion Sources....Pages 21-77 Ion Optics for LMIS....Pages 79-121 Interactions of Ions with Solids....Pages 123-145 Practical Focused Ion Beam Optics and Systems....Pages 147-203 Applications of Focused Ion Beams....Pages 205-290 Back Matter....Pages 291-303