Fundamental Aspects of Plasma Chemical Physics: Kinetics (Springer Series on Atomic, Optical, and Plasma Physics, 85)

Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace, are presented and discussed including the self-consistent kinetics in RF parallel plate reactors, the optimization of negative ion sources and the expansion of high enthalpy flows through nozzles of different geometries. The book will cover the main aspects of the state-to-state kinetic approach for the description of nonequilibrium cold plasmas, illustrating the more recent achievements in the development of kinetic models including the self-consistent coupling of master equations and Boltzmann equation for electron dynamics. To give a complete portrayal, the book will assess fundamental concepts and theoretical formulations, based on a unified methodological approach, and explore the insight in related scientific problems still opened for the research community. Front Matter....Pages i-xvi Electron-Molecule Collision Cross Sections and Rate Coefficients for Processes Involving Excited States....Pages 1-30 Reactivity and Relaxation of Vibrationally/Rotationally Excited Molecules with Open Shell Atoms....Pages 31-56 Formation of Vibrationally and Rotationally Excited Molecules During Atom Recombination at Surfaces....Pages 57-78 Kinetic and Monte Carlo Approaches to Solve Boltzmann Equation for the Electron Energy Distribution Functions....Pages 79-111 Superelastic Collisions and Electron Energy Distribution Function....Pages 113-142 Collisional-Radiative Models for Atomic Hydrogen Plasmas....Pages 143-173 Vibrational Kinetics....Pages 175-204 Particle Models for Low Pressure Plasmas....Pages 205-222 Self-Consistent Kinetics of Molecular Plasmas: The Nitrogen Case....Pages 223-245 Negative Ion H− Kinetics for Fusion....Pages 247-273 Non Equilibrium Plasma in High Enthalpy Flows....Pages 275-303 Toward the Activation of Polyatomic Molecules by eV Processes: The CO2 Case Study....Pages 305-312 Back Matter....Pages 313-318 This book examines non-equilibrium ""cold"" plasmas via a chemical physics approach, using state-to-state plasma kinetics, which views each internal state as a new species with its own cross-sections. Includes examples in microelectronics, fusion, and aerospace