Diffusion in Silicon

1.1. Introduction 1.2. Basic concepts 1.3. Atomic mechanisms of diffusion 1.4. Mathematics of diffusion 1.5. Diffusion equations 1.6. Diffusivity 1.7. Solid solubility 1.8. Deviations from simple diffusion theory 1.9. Diffusion Equipment 1.10. Metrology Properties of the error function