Advanced Technologies Based on Wave and Beam Generated Plasmas: Proceedings of the NATO Advanced Study Institute, Sozopol, Bulgaria, May 22-June 1, 1998 ... Science Partnership Subseries: 3 Book 67)

This volume is based on the lectures at the NATO Advanced Study Institute, entitled "Advanced Technologies Based on Wave and Beam Generated Plasmas", held at Sozopol, Bulgaria, from May 22 till June 1, 1998. It attracted almost 100 participants from 16 different countries. The meeting combined different types of scientists from advanced experts to aspiring young researchers. It aimed at stimulating future development by providing-across borders- cross-fertilization and exchanges between previously unconnected groups. This is reflected in the contents of the volume which covers the lectures given. The book also contains in a second part 43 poster presentations mostly from younger participants with valuable complementations and specifica­ tions to the lectures. With its topics the Advanced Study Institute constitutes the first attempt to bring together in an organized manner three areas of work on plasma technologies: advanced efforts based on wave generated---high frequency-····plasmas, on plasma assisted ion implantation and on electron beam generated plasmas. Front Matter....Pages i-xiii Plasma Discharges for Materials Processing and Display Applications....Pages 1-22 The Development and Use of Surface-Wave Sustained Discharges for Applications....Pages 23-64 Electrodeless Gas Discharges for Lighting....Pages 65-96 Plasma Production above Multipolar Magnetic Field Structures: From D.C. Magnetrons to Distributed ECR....Pages 97-110 ECR Plasmas for Thin-Film Deposition....Pages 111-122 Deposition Properties and Applications of Carbon-Based Coatings....Pages 123-135 Substrate Biasing during Plasma Processing: Interest, Methods and Limitations....Pages 137-148 Ion Energy Distributions....Pages 149-173 Dusty Plasmas: Fundamental Aspects and Industrial Applications....Pages 175-190 Plasma Based Ion Implantation....Pages 191-244 Waveguide Stationary and Nonstationary Discharges: Modelling and Experiments....Pages 245-270 Nonuniformity Aspects in Modelling and Noncollisional Heating of HF Discharges....Pages 271-310 Travelling Wave Discharges in Nitrogen: Modelling and Experiment....Pages 311-334 Atmospheric Pressure Discharges: Traveling Wave Plasma Sources....Pages 335-342 Modeling of Atmospheric Pressure Microwave Sustained Discharges....Pages 343-352 Long Microwave Discharges....Pages 353-365 Waves in Bounded Magnetized Plasmas....Pages 367-390 Electron Beam Generated Plasmas: Theory, Experiments, Applications....Pages 391-428 EBIT: An Electron Beam Source for the Production and Confinement of Highly Ionized Atoms....Pages 429-468 The Anisotropic Etching of Silicon in CF 4 , CF 4 + H 2 and CF 4-X CL X Plasma....Pages 469-470 CF 2 Production by CF 4 Electron Impact Dissociation in Gas Discharge....Pages 471-472 On Negative Ions Langmuir Probe Measurements in an Ar + 4%CF 4 Currentless Plasma....Pages 473-474 Plasma Treatment of Polymer Surfaces in Different Gases....Pages 475-476 Plasma treatment of polymer surfaces in gas mixture....Pages 477-478 Field Emission Characteristics of Thin MPCVD Diamond Films....Pages 479-480 Technological Method of Substratum Metallization by Plasma-Arc Deposition....Pages 481-482 Hydrodynamic and Electrical Characterization of a Corona Discharge Plasma Reactor....Pages 483-484 Study by Mass Spectrometry and Gas Chromatography of Fluorocarbon Waste Destruction in a Low-Pressure Plasma Reactor....Pages 485-486 Cars Applied to Plasmas for NO-Reduction....Pages 487-488 Heating and Melting of the Dust Crystal in a RF Discharge. Non-Linear Analysis....Pages 489-490 Intense Plasma Pulses in Doping, Coating and Glazing the Surface of Solid Materials....Pages 491-492 Monoatomic Ion Rich DECR Plasmas for Ion Implantation by Plasma Immersion Using a New High Voltage — High Current Pulse Generator....Pages 493-494 Spatial Distribution and Kinetics of Negative Ions in Glow DC Discharge in Pure O 2 and H 2 ....Pages 495-496 Diffusion and Wall Loss of Magnesium in Decaying Plasma....Pages 497-498 Diffusion and Depopulation of the Metastable Cd 3 P 0,2 States in Collisions with Neon Atoms....Pages 499-500 Non-Local Regime of Self-Consistency in Stationary Waveguided Discharges....Pages 501-502 Symmetric Mode in a Planar Plasma Waveguide: Numerical Study of Nonlinear Effects....Pages 503-504 Modulation Instabilities of Surface-Wave Sustained Discharges....Pages 505-506 Correlation and Spectrum Analysis of Instabilities in Waveguided Discharges....Pages 507-508 Pulsed Surface Wave Sustained Discharges: Modelling....Pages 509-510 Pulsed discharges produced by surface waves in 3-cm wavelength band in the air....Pages 511-512 Pulsed Microwave Discharge in Nitrogen: Diagnostics and Modeling....Pages 513-514 The Turning Back and the Turning Forward of the Wave Number in Surface Wave Propagation....Pages 515-516 Experimental Indications for the Existence of Plasma Resonances in Surface Wave Discharges....Pages 517-518 Test Surface Waves as a Diagnostics Tool for SWSD....Pages 519-520 Optical Spectroscopy Diagnostics of Waveguided Discharges in a Non-Stationary Regime....Pages 521-522 A New Passive Compensation Technique for Probes in Oscillating Electric Fields....Pages 523-524 Modelling of Radio Frequency Capacitively Coupled Plasma at Intermediate Pressures....Pages 525-526 Two-Dimensional Mapping of the Electron Energy Distribution Function....Pages 527-528 Modeling of the Equivalent Circuit of Inductively Coupled Plasma Sources....Pages 529-530 Optical Measurements of Gas Temperature in Microwave Discharge Plasma in Hydrogen....Pages 531-532 Gas Temperature Influence on the Particle Kinetics in a Surface-Wave-Sustained Nitrogen Discharge....Pages 533-534 Excited Atoms and Charged Particles Axial Distributions in Argon Microwave Plasmas at Various Gas Pressures....Pages 535-536 A study of excitation mechanisms in atmospheric microwave induced argon plasmas....Pages 537-538 2D Model for a Microwave Sustained Discharge in Nitrogen at Atmospheric Pressure....Pages 539-540 Influence of Ionization Effects on Drift-Dissipative Instability....Pages 541-542 Investigation of the Electron Distribution Functions in Low Pressure Electron Cyclotron Resonance Discharges....Pages 543-544 Electromagnetic Waves in a Magnetized Plasma Column....Pages 545-548 Magnetoplasmons Guided by a Cyrotropic Plasma Layer on a Metal Substrate....Pages 549-552 Wave Propagation in a Free Gyrotropic Plasma Layer....Pages 553-554 Source of an Annular Controlled Radius Plasma....Pages 555-556 Beam-Plasma Instability Effects Supporting Capacitive Low Pressure RF Discharges....Pages 557-558 Back Matter....Pages 559-569 This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It encompasses all the links in the progress from fundamentals to applications: the description and modelling of different plasma sources to technological use; from general diagnostics to methods related to technological control and operation of plasma reactors. The book lays a foundation for the application of sources in industry (in high-tech electronics, microelectronics, IC fabrication, plasma chemistry, lighting, new materials, optics, the biomedical industry, aerospace, etc.), and in astrophysics, atomic physics, laser physics, accelerator physics and microwave devices. This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It lays a foundation for the application of sources in industry and various research areas Proceedings of the NATO Advanced Study Institute, Sozopol. Bulgaria, May 22-June 1, 1998